椭偏仪在位表征电化学沉积的系统搭建（二十三）- 全波段沉积过程的准在位测试分析-不同沉积时间所对应的

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椭偏仪在位表征电化学沉积的系统搭建（二十三）- 全波段沉积过程的准在位测试分析-不同沉积时间所对应的椭偏参数

1、不同沉积时间所对应的椭偏参数Psi、Delta、R

图4-5是得到的不同沉积时间椭偏参数Psi和Delta及反射率R随着波长的变化，对比0s的图线，Psi、Delta、α及R值在整体上都是减小的，整体趋势较相似，但存在峰位的增加及峰位的移动。从图4-5(a、e)来看，与0s相比，不同沉积时间Psi值随波长的变化趋势的大致相同。不同沉积时间的Psi值在300nm到500nm波段变化较小，相较于0s时在330nm处出现峰位。沉积时间为180s时，波长在500-800nm的长波范围，其值从衬底的44°减小到30°左右。在沉积时间增加到540s、900s、1080s时，在约540nm处出现一个较明显的波包。不同时间测试得到的Psi值有变化，这也意味测试的基底表面发生了变化。图4-5(b、f)中显示椭偏参数Delta值随着时间的变化与椭偏参数Psi的趋势一致。在长波500-800nm的范围内得到的不同时间的Delta值从Au衬底所对应120°减小到70°附近。当沉积时间增加到540s、900s、1080s时，约在540nm处出现较明显的峰位。Delta值同样显示出测试基底表面发生了改变。图4-5(c、g)是吸收系数α随不同沉积时将随波长的变化，和0s相比，整体上变化趋势相似，但是在数值及吸收波包上存在变化。在300-500nm波段不同沉积时间变化趋势及数值比较接近，且都在大约330nm处出现新的吸收波包。在500-800nm波段，540s、900s、1080s都在500-550nm波段出现新的波包且随着时间的增加存在红移现象。数值的变化及新的吸收波包的出现，可能是由于沉积的CU₂O带来的，有待进一步验证。图4-5(d、h)中显示反射系数R值随着时间的变化，其变化规律和吸收率相似。当沉积时间为180s的时候，R的值大约从Au基底的1附近降为0.3左右，在波长为300-500nm之间存在两个波包(330nm，400nm),在波长为500-800nm之间存在两个波包(540nm，630nm)。当沉积时间为360s时与180s的曲线很接近，但是在长波500-800nm减为1个较明显的波包，大约在600nm附近。当沉积时间增加到540s时，在500nm-800nm范围出现两个比180s更大的波包(510nm，660nm)。到720s时，R值随波长的变化与360s一致。到900s和1080s时，R值随波长的变化与540s一致，但500nm到800nm的两个波包峰位有所变化。总体上看，在短波段R值随着沉积时间的变化十分微小且曲线比较光滑，但是在长波段会随着沉积时间的不同上下波动且曲线本身也存在波动。说明长波对基底表面变化更敏感，对测试信息影响更大。对比文献中Au的反射率知道其在长波段的反射率接近1与0s时的R相似，故认为在没有沉积之前整个池体椭偏数据主要反应的是Au基底的信息。与沉积0s相比，不同沉积时间的反射率R减小，说明Au衬底的信息减少，这是由于CU₂O的沉积导致。

图4-5不同沉积时间(180s,360s,720s,1080s)的椭偏数据：

(a，e)Psi；

(b，f)Delta；

(c，g)α；

(d，h)R

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